Practical non-contact surface measuring instrument with one nanometre resolution

Optical heterodyne profilometry

Gary E. Sommargren · Applied Optics · 1981 · 246 citations

Natural Sciences, Physics, Optics +16

Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer

Jean M. Bennett · Applied Optics · 1976 · 213 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface roughness measurements of low-scatter mirrors and roughness standards

Karl H. Guenther, Peter G. Wierer, Jean M. Bennett · Applied Optics · 1984 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +17

Optical profilometer: a new method for high sensitivity and wide dynamic range

Yeshaiahu Fainman, Joseph Shamir · Applied Optics · 1982 · 76 citations

Engineering, Electrical Engineering, Metrology +15

Calculation Of Surface Statistics From Light Scatter

John C. Stover, Steven A. Serati, Calvin H. Gillespie · Optical Engineering · 1984 · 59 citations

Natural Sciences, Materials Engineering, Optics +16