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On the temperature compensation of parallel piezoresistive microcantilevers in CMOS biosensor

EngineeringMicrofabricationParallel Piezoresistive MicrocantileversBioelectronicsTemperature CompensationNano Electro Mechanical SystemSensor DesignBiomedical EngineeringInstrumentationMicro-electromechanical SystemMicroelectronicsSensor TechnologyCmos BiosensorMicrofluidics