Concepedia

The effect of the polishing pad treatments on the chemical-mechanical polishing of SiO2 films

Weidan Li, Dong Wook Shin, M. Tomozawa, S. P. Murarka

Thin Solid Films · 1995 · 86 citations · 2 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingSurface ScienceThin FilmsCoating ProcessesCoatingsSurface FinishingSurface ModificationSurface PreparationSurface TreatmentChemical-mechanical Polishing CleanlinessMechanical PolishingPolishingPolishing ProcessesSilica-based MaterialsSilicon Dioxide

References

2

Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects

F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations

Engineering, Materials Engineering, Materials Science +17

Application of Chemical Mechanical Polishing to the Fabrication of VLSI Circuit Interconnections

W. Patrick, W. L. Guthrie, C. L. Standley et al. · Journal of The Electrochemical Society · 1991 · 237 citations

Engineering, Electrical Engineering, Materials Science +17