Publication | Closed Access
Influence of plasma discharge on the structure of polytetrafluoroethylene film and step coverage on polymer substrate
19
Citations
7
References
2006
Year
Materials ScienceEngineeringPolytetrafluoroethylene FilmPolymer TechnologyGlow DischargePolymer SciencePolymer ProcessingPolymer EngineeringStep CoverageGas Discharge PlasmaPlasma ProcessingPlasma DischargeElectrical Insulation
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