Design of a high-resolution angle-resolving electron energy analyzer

Abstract

An angle-resolving electron energy analyzer capable of operating at an energy resolution of ≲20 meV and an angular resoltuion of ≲1/4° has been designed, constructed, and tested. A novel input lens allows independent control over both the energy and angular resolution. A series of tests has been performed which indicates that the analyzer operates at the theoretical resolution limit for the lowest values used.