Electrochemical properties of dielectric films of aluminium oxide deposited on silicon

Physics of Semiconductor Devices

Geoffrey Pridham · Electronics and Power · 1970 · 4K citations

Engineering, Electrical Engineering, Physics +12

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Physical and Chemical Properties of Aluminum Oxide Film Deposited by AlCl₃-CO₂-H₂System

Kiyoto Iida, T. Tsujide · Japanese Journal of Applied Physics · 1972 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +14

Al2O3-SILICON INSULATED GATE FIELD EFFECT TRANSISTORS

A. Waxman, K.H. Zaininger · Applied Physics Letters · 1968 · 50 citations

Engineering, Electrical Engineering, Materials Science +17

The thermal transformation of alumina monohydrate, boehmite

Taichi Sato · Journal of Applied Chemistry · 1962 · 27 citations

Natural Sciences, Chemistry, Materials Science +14