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A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading

Materials ScienceEngineeringReaction-layer MechanismMicrofabricationSilicon On InsulatorMechanical EngineeringApplied PhysicsDelayed FailureSemiconductor Device FabricationThin FilmsHigh-cycle Fatigue LoadingMicroelectronicsLow-cycle FatigueMechanics Of MaterialsMicrostructure