Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering - Concepedia

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Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

153

Citations

19

References

2004

Year

W. Gulbiński, Sanjay Mathur, Huixin Shen, T. Suszko, A. Gilewicz, B. Warcholiński

Applied Surface Science

Materials ScienceEngineeringApplied PhysicsMagnetron SputteringThin Film Process TechnologyThin FilmsH Thin FilmsThin Film Processing

References

	Year	Citations

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