Applied Surface Science · 2004 · 154 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsMaterials CharacterizationThin FilmsMagnetic Thin FilmsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsCeramic Thin FilmsMagnetron SputteringSputteringThin Film CeramicsThin Film Deposition Materials
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Hardness measurements of thin films
B. L. G. Jonsson, Sture Hogmark · Thin Solid Films · 1984 · 727 citations
Natural Sciences, Materials Engineering, Materials Science +13
Pulsed magnetron sputter technology
S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 338 citations