Publication | Closed Access
Synchrotron X-radiation plane-wave topography for imaging microdefects in thinned silicon crystals
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Citations
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References
1990
Year
EngineeringPhysicsMicroscopyMicrofabricationX-ray DiffractionApplied PhysicsSynchrotron RadiationX-ray OpticSynchrotron Radiation SourceSilicon On InsulatorThinned Silicon Crystals
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