Technique for Ohmic Connecting Leads to Silicon - Concepedia

Concepedia

Publication | Open Access

Technique for Ohmic Connecting Leads to Silicon

DOI Full Paper Access

11

Citations

0

References

1962

Year

E. Matsuura, Kohei Matsui, Ryukiti R. Hasiguti

Journal of Applied Physics

Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationNanoelectronicsApplied PhysicsOhmic ConnectingSemiconductor Device FabricationSilicon On Insulator

Abstract

First Page