Nuclear Instruments and Methods in Physics Research · 1982 · 30 citations · 2 references
Natural SciencesElectrical EngineeringPlasma PhysicsRadiation PhysicsPlasma ElectrodynamicsPlasma Surface TreatmentPlasma-surface InteractionsDiffraction GratingsPlasma CleaningPlasma ProcessesPlasma-induced DegradationRadiation-induced Surface EffectsSurface Contamination Removal
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