Concepedia

The influence of O2, H2, H2O, N2, CO and CH4 on the structure of thin silver films investigated by ultrahigh vacuum internal stress measurements

R. Koch, H. Leonhard, R. Abermann

Thin Solid Films · 1982 · 21 citations · 10 references

DOI

Concepts

References

10

Basic problems in thin film physics

Vacuum · 1968 · 231 citations

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Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substrates

R. Abermann, R. Kramer, J. Mäser · Thin Solid Films · 1978 · 135 citations

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Recent developments in the study of mechanical properties of thin films

Koreo Kinosita · Thin Solid Films · 1972 · 102 citations

, , +16

Stress distributions and thin film mechanical properties

R. W. Hoffman · Surface and Interface Analysis · 1981 · 80 citations

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Electron microscope structure and internal stress in thin silver and gold films deposited onto MgF2 and SiO substrates

R. Abermann, R. Koch, R. Kramer · Thin Solid Films · 1979 · 64 citations

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