Optical Roughness Measuring Instrument For Fine-Machined Surfaces

Abstract

The roughness measuring instrument described is based on light scattering and is suitable in a wide range of applications, especially in micro-machining. The most important properties are the sensitivity in the measuring range from below 0.005 i.im up to 2µm (Ra value), the independence of the reflection coefficient due to normalization, and the larger tolerance of measur-ing distance of ±2 mm.