Publication | Closed Access

Initial reaction of silicon precursors with a varying number of dimethylamino ligands on a hydroxyl-terminated silicon (001) surface

Dimethylamino LigandsEngineeringMicrofabricationNanotechnologySurface ChemistrySurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationChemistrySilicon On InsulatorInitial ReactionSilicon Precursors