High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators

Abstract

This paper presents a micromachined lead zirconate titanate-on-silicon electromechanical resonator, tunable from series to parallel resonance, for either bandstop or bandpass filter applications. Scattering parameter measurements (9.2 V direct current (DC) bias) reveal bandstop rejection levels > 109 dB at 59.74 MHz and passband loss of 40 dB with a −20-dB bandwidth of 25 kHz (0.042%). These compare within 5-dB of the models. Parallel resonance is also observed for an alternate mechanical mode at 182.8 MHz with a 1.5 V DC bias with a rejection of 54.7 dB, a −20 dB bandwidth of 41 kHz (0.022%). This mode is tunable with the electric field to show series resonance.