Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Piezoresistance in polysilicon and its applications to strain gauges

P.J. French, A G R Evans · Solid-State Electronics · 1989 · 185 citations

Engineering, Materials Engineering, Materials Science +7

Polysilicon: a versatile material for microsystems

P.J. French · Sensors and Actuators A Physical · 2002 · 159 citations

Engineering, Materials Engineering, Materials Science +12

Piezoresistive pressure sensors based on polycrystalline silicon

V. Mosser, J. Suski, Jonathan P. Goss · Sensors and Actuators A Physical · 1991 · 155 citations

Engineering, Materials Engineering, Materials Science +14

Surface micromachined pressure transducers

H. Guckel · Sensors and Actuators A Physical · 1991 · 129 citations

Engineering, Materials Science, Mechanical Engineering +12