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Formation of two ripple modes on Si by ion erosion with simultaneous Fe incorporation

Materials EngineeringMaterials ScienceIon ImplantationSimultaneous Fe IncorporationEngineeringPhysicsIon ErosionSurface ScienceApplied PhysicsSiliceneRipple ModesSemiconductor Device FabricationIon EmissionSilicon On InsulatorMicroelectronics