Measurement of rotational and vibrational temperatures in a low-pressure plasma device using the Abel transform and a spectral slit function

Abstract

Results of application of two-dimensional detection to optical emission spectroscopy diagnosis are given. The analysis was performed on a low-pressure (0.1 Torr) nitrogen plasma discharge produced by a new type of direct current reactor, which produces current amplification effects. The measured spectra are subjected to several treatments including calibration of the luminous intensity and Abel deconvolution, which allow us to construct radial spectra theoretically. A comparison between these spectra and simulated spectra has been carried out in order to evaluate the temperatures of the medium and to obtain their radial distribution. The possibility of obtaining a more accurate evaluation of rotational and vibrational temperatures is discussed.