Concepedia

Publication | Closed Access

Characterization of CFx films plasma chemically deposited from C3F8/C2H2 precursors

DOI

27

Citations

41

References

2003

Year

D. Koshel, Hongguang Ji, B. Terreault, A. Côté, G.G. Ross, G. Abel, M. Bolduc
Surface and Coatings Technology

References

YearCitations

Page 1