Surface and Coatings Technology · 2003 · 27 citations · 41 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionCoatingsHigh-temperature PlasmasPlasma Surface TreatmentPlasma-surface InteractionsThin-film DepositionPlasma DepositionPlasma-assisted CoatingPlasma-assisted OxidationPlasma-enhanced DepositionPrecursor Chemistry
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