In-plane silicon probes for simultaneous neural recording and drug delivery

Abstract

This paper reports on the design, fabrication and characterization of silicon-based microprobes for simultaneous neural recording and drug delivery. The fabrication technology is based on two-stage deep reactive ion etching combined with silicon wafer bonding and grinding to realize channel structures integrated in needle-like probe shafts. Liquids can be supplied to microfluidic devices via in-plane and out-of-plane ports. The liquid is dispensed at circular out-of-plane ports with a diameter of 25 µm and rectangular in-plane ports with dimensions of 50 × 50 µm2. Two-shaft probes with a pitch between shafts of 1.0 and 1.5 mm were realized. The probe shafts have a length of 8 mm and rectangular cross-sections of w × h (w = 250 µm and h = 200 or 250 µm). Each shaft contains one or two fluidic channels with a cross-section of 50 × 50 µm2. In addition, each probe shaft comprises four recording sites with diameters of 20 µm close to the outlet ports. Mechanical and fluidic characterization demonstrated the functionality of the probes. Typical infusion rates of 1.5 µL min−1 are achieved at a differential pressure of 1 kPa. The Pt-gray electrodes have an average electrode impedance of 260 ± 59 kΩ at 1 kHz.