Applied Physics Letters · 2007 · 86 citations · 12 references
MedicineBiomedical EngineeringMaterials ScienceThin FilmsUltrasonographyUltrasoundDiagnostic UltrasonographyTransducer TechnologyUltrasonicsUltrasound ImagingUltrasound InstrumentationUltrasound PhysicsAperture SizePiezoelectric Thin FilmsResonant FrequencySkin Cancer DetectionTransducersUltrasonic ImagingUltrasonic TransducersUltrasound Imaging Transducers
A micromachined self-focusing high frequency ultrasonic transducer was fabricated with a 13μm thick ZnO film deposited on a silicon substrate by sputtering. X-ray diffraction shows that the film has a high (002) orientation. The element aperture size of the transducer was 2.5mm, and the fundamental resonant frequency was designed to be over 200MHz with approximately 28% bandwidth through only one matching layer. Experimental results show that this type of focused high frequency ultrasound device may have potential for cellular microstructure imaging and skin cancer detection.
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Jonathan M. Cannata, Timothy A. Ritter, Wo-Hsing Chen et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2003 · 345 citations