Use of Schottky-diode collectors for SEM determination of bulk diffusion lengths

Abstract

Schottky diodes were used as collectors in the determination of bulk hole diffusion lengths (Lhn) by means of a scanning electron microscope in the beam-induced current mode. The scans were performed on cross sections obtained by cleavage along a plane perpendicular to the metal layer. For n-type GaP this technique yields excellent results.