Applied Physics A · 2004 · 305 citations · 20 references
EngineeringMaterials EngineeringMaterials ScienceNanotechnologyPlasma PhysicsSemiconductor DevicesLaser Material ProcessingLaser OpticsLaser PhysicsLaser-plasma InteractionsSilicon MaterialsUltrafast OpticsAblation ModelingAblation PhysicsFemtosecond Laser PulsesLaser AblationMaterial AblationPlasma ExpansionPlasma Volume ExpansionUltrafast Laser Material Processing
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