Publication | Closed Access
Effect of energetic bombardment on the magnetic coercivity of sputtered Pt/Co thin-film multilayers
107
Citations
11
References
1990
Year
Optical MaterialsEngineeringPt/co MultilayersThin Film Process TechnologyMagnetismMagnetic Thin FilmsThin Film ProcessingMaterials SciencePhysicsMagnetic CoercivityMagnetic MaterialMagnetic MediumSurface ScienceApplied PhysicsEnergetic BombardmentCo LayersThin FilmsMagnetic PropertyChemical Vapor Deposition
Pt/Co multilayers are an attractive candidate for a magneto-optical recording medium. However, films sputter deposited in Ar have coercivities too small (100–350 Oe) to be practical in recording. By sputter depositing multilayers in Kr or Xe instead of Ar, we achieved coercivities ∼1000 Oe, suitable for recording. We attribute the lower coercivity of Ar-sputtered films to interfacial mixing of Pt and Co layers by energetic bombardment from Ar gas atoms that recoil from the Pt target.
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