Fabrication and characterization of ITO thin films deposited by excimer laser evaporation

Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windows

I. Hamberg, C. G. Granqvist · Journal of Applied Physics · 1986 · 2.3K citations

Natural Sciences, Chemistry, Materials Engineering +17

Physics of semiconductor devices

Choice Reviews Online · 1990 · 1.4K citations

Engineering, Electrical Engineering, Physics +12

A microstructural study of low resistivity tin-doped indium oxide prepared by d.c. magnetron sputtering

Yuzo Shigesato, David C. Paine · Thin Solid Films · 1994 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low resistivity indium tin oxide films by pulsed laser deposition

Jim P. Zheng, Hoi Sing Kwok · Applied Physics Letters · 1993 · 156 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition

Jim P. Zheng, Q. Y. Ying, Sarath Witanachchi et al. · Applied Physics Letters · 1989 · 133 citations

Natural Sciences, Materials Science, Physics +14