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The effect of hydrogen peroxide on polishing removal rate in CMP with various abrasives

Materials ScienceAdvanced Oxidation ProcessChemical EngineeringEngineeringMaterial ProcessingCorrosionEnvironmental EngineeringRemoval RateWater TreatmentAbrasive ProcessVarious AbrasivesSurface TreatmentMineral ProcessingHydrogen PeroxideAbrasive MachiningWastewater Treatment