Survey of low temperature rf plasma polymerization and processing

Abstract

Plasma-induced polymerization of both conventional and unconventional monomers has produced materials of unique properties suitable for applications in diverse fields. These fields include permselective and biological membranes, barrier coatings, dielectric layers, antireflection optical coatings, light guides, and adhesive bonding of otherwise incompatable materials. The science behind these applications is developing into predictions of properties based on defined variables but has not resolved some basic questions (such as reaction mechanism or residual activity within the films). Solutions to these problems will expand the applications horizon.