Optics Letters · 1992 · 49 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOpticsPhotonicsImplant MaterialsIon ImplantationLaser Material ProcessingOptoelectronic MaterialsRefractive IndexSilicon MaterialsColor CentersExcimer LasersHeavy Ion RadiationIon Implantation EffectsOptical AbsorptionRefractive Index ChangesVisible Radiation
The changes in refractive index, optical absorption, and volume of synthetic fused silica resulting from the implantation of germanium and silicon ions at energies of 3 and 5 MeV are reported. Implantation changes the density and generates ultraviolet color centers in the silica, which increases the refractive index at visible wavelengths by ~1%. Irradiation of the implanted samples with 249-nm light from a KrF excimer laser photobleaches the color centers and reduces the index by more than 0.1%. Photobleaching is used to write a 4.3-microm pitch diffraction grating in the implanted silica.
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Optical effects of ion implantation
P. D. Townsend · Reports on Progress in Physics · 1987 · 288 citations
Natural Sciences, Materials Engineering, Materials Science +17
Compaction of ion-implanted fused silica
E.P. EerNisse · Journal of Applied Physics · 1974 · 189 citations