All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films

Abstract

A crystalline all-oxide microelectromechanical system is presented. A suspended SrTiO3(001) cantilever is employed as flexible substrate for the deposition of epitaxial transition-metal oxide films. A strain generator device for oxide films is thus demonstrated, changing the conductivity of an overgrown epitaxial (La,Sr-)-MnO3 film by bending downward the SrTiO3 element with an AFM tip or a gate voltage bias.