Optical properties and tunability of macroporous silicon 2‐D photonic bandgap structures

Abstract

Abstract Photonic bandgap (PBG) materials offer an attractive and compact way of integrating the building blocks for optical interconnects and optoelectronic circuits. In this work we demonstrate 2‐D macroporous silicon PBG structures fabricated using interferometric lithography and electrochemical etching of silicon. Optical measurements match well with simulations. We achieve tuning of the PBG using liquid crystals (LCs) infiltrated inside the porous silicon. Surface treatment methods for controlling the initial LC molecule orientation inside the pores are also demonstrated. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)