On the properties of indium doped ZnO thin films

Abstract

Thin films of undoped and In-doped zinc oxide, prepared using chemical spray pyrolysis, were investigated using x-ray diffraction, optical transmission and absorption spectra, SEM, resistivity measurements, x-ray photoelectron spectroscopy and photoluminescence studies. A doping level of 1 at% indium was found to give lowest resistive films and enhanced optical transmission. But increasing the doping percentage resulted in lower optical transmission. XPS investigations revealed the presence of elemental chlorine in the In-doped film. Undoped ZnO thin films gave a strong blue-green emission. Doping with indium apparently resulted in a competitive phenomenon that overshadows the blue-green emission and gave rise to three emissions at 408, 590 and 688 nm.