Analysis of the oxidation kinetics and barrier layer properties of ZrN and Pt/Ru thin films for DRAM applications - Concepedia

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Analysis of the oxidation kinetics and barrier layer properties of ZrN and Pt/Ru thin films for DRAM applications

26

Citations

8

References

1996

Year

Husam N. Alshareef, X. Chen, Daniel J. Lichtenwalner, Angus I. Kingon

Thin Solid Films

Materials ScienceEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsDram ApplicationsBarrier Layer PropertiesSemiconductor MemoryThin FilmsPt/ru Thin FilmsMicroelectronicsThin Film Processing

References

	Year	Citations

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