Concepedia

Publication | Closed Access

High temperature oxygen implantation in silicon: Soil structure formation characteristics

DOI

28

Citations

17

References

1987

Year

S. Maillet, R. Stuck, J.J. Grob, A. Golański, R. Pantel, A. Pério
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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