Micro optical diffusion sensor using a comb-driven micro Fresnel mirror

Abstract

We have developed a novel micro optical diffusion sensor (MODS) with a newly proposed comb-driven-micro Fresnel mirror (CD-MFM) scanner to detect structural changes in biological samples. By controlling the fringe spacing of the excitation laser beam, we can tune the decay time to obtain quick and precise measurements. In this study, the pre-tilted mirror is rotated by vertical comb-driven actuators; the resulting change in the mirror angle alters the fringe spacing. The validity of the proposed mirror scanner is confirmed in simulations and in an experiment using a fabricated prototype device.