Plasma deposition of amorphous carbon films from CH4 atmospheres highly diluted in Ar - Concepedia

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Plasma deposition of amorphous carbon films from CH4 atmospheres highly diluted in Ar

DOI Full Paper Access

30

Citations

32

References

2002

Year

Luiz G. Jacobsohn, G. Capote, Nilson Cristino da Cruz, A. R. Zanatta, F. L. Freire

Thin Solid Films

Materials ScienceChemical EngineeringPlasma DepositionEngineeringChemical Vapor DepositionChemistryChemical DepositionAmorphous Carbon FilmsPlasma Processing

References

	Year	Citations

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