Publication | Closed Access
Vapour phase growth of InP from the In-PH3-HCl-H2 system
31
Citations
16
References
1984
Year
Chemical EngineeringEngineeringPhase EquilibriumPhysical ChemistryExperimental ThermodynamicsChemistryHydrogenChemical KineticsChemical Vapor DepositionVapour Phase Growth
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