Publication | Closed Access
<i>P-N</i> Junction Formation during Molecular-Beam Epitaxy of Ge-Doped GaAs
105
Citations
8
References
1971
Year
SemiconductorsMaterials ScienceIi-vi SemiconductorSemiconductor TechnologyEngineeringPhysicsP LayersApplied PhysicsGe-doped GaasOptoelectronic DevicesSubstrate SurfaceMolecular Beam EpitaxyMolecular BeamCategoryiii-v SemiconductorOptoelectronicsCompound Semiconductor
Germanium was used to dope both the n and p layers of GaAs grown when molecular beams containing Ge, Ga, and As2 simultaneously impinged on the substrate surface. The formation of n- or p-type layers is dependent on the ratio of As2/Ga in the molecular beam and the substrate temperature. We describe the process used for the doping as well as the photoluminescence spectra from these layers.
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