Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma - Concepedia

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Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma

16

Citations

12

References

2007

Year

Su Ryun Min, Hanna Cho, Yuelong Li, Chee Won Chung

Thin Solid Films

Materials ScienceElectrical EngineeringEngineeringHbr/ar PlasmaNanoelectronicsSurface ScienceApplied PhysicsGas Discharge PlasmaMicroelectronicsPlasma EtchingZno FilmsPlasma ProcessingPlasma Application

References

	Year	Citations

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