The Role of Dissociative Electron Attachment in Focused Electron Beam Induced Processing: A Case Study on Cobalt Tricarbonyl Nitrosyl

Abstract

Put a number on it: Absolute cross-sections for dissociative electron attachment (DEA) to the common precursor molecule cobalt tricarbonyl nitrosyl in the gas phase are reported (see scheme, Co dark blue, O red, C gray, N light blue) along with the branching ratios for the negative ions and the electron affinities for the neutral radical fragments. Further, a general mechanism of DEA is proposed for metal–carbonyl compounds.