Publication | Closed Access
Silicon surface passivation using thin HfO2 films by atomic layer deposition
57
Citations
30
References
2015
Year
Chemical EngineeringEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsThin Hfo2 FilmsSemiconductor Device FabricationThin FilmsSilicon Surface PassivationEpitaxial GrowthChemical Vapor DepositionAtomic Layer DepositionThin Film Processing
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