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Tunable thin film filters
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2003
Year
Unknown Venue
Materials SciencePhotonicsOptical MaterialsEngineeringPhysicsMicrofabricationOptical PropertiesApplied PhysicsAmorphous SemiconductorsMulticavity DesignsThin Film Process TechnologyThin FilmsDynamic MetamaterialsOptoelectronicsThin Film ProcessingElectro-optics Device
We report widely tunable thin film filters, including both single-cavity and multicavity designs, based on thermo-optic effects in thin films of amorphous semiconductors deposited by PECVD. Applications include an optical channel monitor packaged in a TO can.