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Deep micro-hole fabrication in EMM on stainless steel using disk micro-tool assisted by ultrasonic vibration

Materials ScienceEngineeringStainless SteelMicrofabricationMechanical EngineeringFabrication TechniqueDeep Micro-hole FabricationUltrasonic VibrationMicro-electromechanical SystemMicrostructureMicromachined Ultrasonic Transducer