Silicon nanopillar arrays with SiO_2 overlayer for biosensing application

Abstract

We present the fabrication of silicon dioxide (SiO 2 ) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors.Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO 2 coated Si nanopillar arrays with two different diameters and periods.Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode.A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements.