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LiPON thin films with high nitrogen content for application in lithium batteries and electrochromic devices prepared by RF magnetron sputtering

Materials ScienceElectrical EngineeringEngineeringElectrochemical Power SourceLithium-ion BatteryRf MagnetronEnergy StorageElectrochemical Energy StorageBatteriesLipon Thin FilmsThin FilmsHigh Nitrogen ContentSolid-state BatteryElectrochemistry