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Correlation between microstructural and optical properties of silicon thin films grown onto porous alumina by plasma–enhanced CVD method

Materials SciencePorous AluminaOptical MaterialsEngineeringOptical PropertiesSurface ScienceApplied PhysicsPlasma–enhanced Cvd MethodThin Film Process TechnologyThin FilmsChemical Vapor DepositionPlasma ProcessingPlasma EtchingSilicon Thin FilmsThin Film Processing