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3D approaches for non-volatile memory

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2011

Year

Abstract

The NAND flash market is continuously growing by the successive introduction of innovative devices and applications. To meet the market trend, 3-dimenstional (3D) non-volatile memories (NVMs) are expected to replace the planar one, especially for 10 nm-nodes and beyond. Therefore, the fundamentals and current status of the 3D NAND flash memory are reviewed and future directions are discussed.