Laser & Photonics Review · 2014 · 178 citations · 115 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsPhotonicsEtching ProcessesIntegrated PhotonicsOptical WaveguidesPhotonic Integrated CircuitsPhotonic MaterialsUltrafast OpticsDevice FabricationEtchingIntegrated LasersIntegrated Photonic DevicesSelective EtchingUltrafast Laser Material ProcessingWaveguide DesignWaveguide Fabrication
The review examines how ultrafast laser inscription could shape future photonic devices and lab‑on‑chip technologies. It surveys waveguide fabrication techniques, detailing three cross‑section architectures and highlighting photonic devices and selective‑etching‑based lab‑on‑chip structures enabled by ULI.
Abstract This paper reviews the recent advancements achieved using ultrafast laser inscription (ULI) that highlight the cross‐disciplinary potential of the technology. An overview of waveguide fabrication is provided and the three distinct types of waveguide cross‐section architectures that have so far been fabricated in transparent dielectric materials are discussed. The paper focuses on two key emergent technologies driven by ULI processes. First, the recently developed photonic devices, such as compact mode‐locked waveguide sources and novel mid‐infrared waveguide lasers are discussed. Secondly, the phenomenon and applications of selective etching in developing ultrafast laser inscribed structures for compact lab‐on‐chip devices are elaborated. The review further discusses the conceivable future of ULI in impacting the aforementioned fields.
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