Journal of Applied Physics · 2008 · 183 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistryOptical MaterialsLuminescent MaterialsMetal OxidesChemical EtchingDirect SynthesisEtchingPhosphor MaterialsPhosphorescent MaterialsPhosphorsWet Chemical EtchingWet Etching
A new method of synthesizing Mn-activated phosphor is presented. The method uses only chemical etching of Si wafer in HF/H2O solution with the addition of an oxidizing agent KMnO4. The luminescence centers of red emission are ascribed to Mn4+ ions in the octahedral sites of potassium hexafluorosilicate (K2SiF6). The luminescence intensity becomes much stronger at higher temperatures, without largely changing its spectral feature.
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Visible luminescence from silicon wafers subjected to stain etches
R. W. Fathauer, T. George, A. Ksendzov et al. · Applied Physics Letters · 1992 · 238 citations
Photoluminescence and formation mechanism of chemically etched silicon
S. Shih, Keun‐Hwa Jung, T. Y. Hsieh et al. · Applied Physics Letters · 1992 · 129 citations