International Conference on Perspective Technologies and Methods in MEMS Design · 2009 · 22 citations · 1 references
EngineeringElectrical EngineeringMechanical EngineeringInstrumentationMicroelectromechanical SystemsSensorsCapacitive SensingMems CharacterizationMems DesignMems SensorsMicroelectromechanical SensorsSensor NoiseAnalog Readout CircuitsCapacitive Readout CircuitsGyroscopesLow-noise DesignReadoutReadout Integrated CircuitsSensor Readout CircuitsVelocity Sensors
In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.
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