Preparation of Pb(Zr,Ti)O₃ Thin Films on Ir and IrO₂ Electrodes

Abstract

Pb(Zr x Ti 1- x )O 3 (PZT) thin films were prepared on Ir and IrO 2 electrodes. Ir has very similar properties to Pt, and IrO 2 is a conductive oxide. Perovskite single-phase PZT thin films were obtained on their electrodes. PZT thin films were grown by the conventional sol-gel method with rapid thermal annealing (RTA) at 700° C. When Pt thin films were deposited directly on poly-Si, PtSi layers were formed, and PZT thin films on the Pt had very poor crystallinity. When an IrO 2 layer was formed between PZT and poly-Si, a high-quality PZT thin film was obtained. Moreover, when electrodes including the IrO 2 layer were used, fatigue properties of PZT thin films were drastically improved.